ISSN 2380-4505
Vol. 2009, Issue Symposium, 2009May 11, 2026 EDT
Laser Scribing of Copper/Low-k Dielectric Semiconductor Materials by Nanosecond and Ultrafast Pulsewidth Lasers
Laser Scribing of Copper/Low-k Dielectric Semiconductor Materials by Nanosecond and Ultrafast Pulsewidth Lasers
Hooper, A., D. Barsic, H. Zhang, and J. O’Brien. 2026. “Laser Scribing of Copper/Low-k Dielectric Semiconductor Materials by Nanosecond and Ultrafast Pulsewidth Lasers.” IMAPSource Proceedings 2009 (Symposium): 433–39. https://doi.org/10.4071/001c.162059.