Improvement in Flip-Chip Bonding by Reduction of Oxides Using Hydrogen Radicals

Tsuyoshi Nakashima; Koji Miyamoto; Michihiro Sato; Kanta Nogita; Akira Izumi

doi:10.4071/001c.161490

Nakashima, Tsuyoshi, Koji Miyamoto, Michihiro Sato, Kanta Nogita, and Akira Izumi. 2026. “Improvement in Flip-Chip Bonding by Reduction of Oxides Using Hydrogen Radicals.” IMAPSource Proceedings 2009 (Symposium): 1028–31. https://doi.org/10.4071/001c.161490.

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