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ISSN 2380-4505
Symposium Proceedings
Vol. 2009, Issue Symposium, 2009May 06, 2026 EDT

Development of an AlN HTCC Multilayer System with a Tungsten Cofiring Metallization

Bernd Joedecke, Marco Fritsch, Christel Kretzschmar, Lars Rebenklau, Alexander Michaelis,
aluminium nitridetungsten metallizationshrinkage behaviourresidues of carbon
https://doi.org/10.4071/001c.161858
IMAPSource Conference Papers
Joedecke, Bernd, Marco Fritsch, Christel Kretzschmar, Lars Rebenklau, and Alexander Michaelis. 2026. “Development of an AlN HTCC Multilayer System with a Tungsten Cofiring Metallization.” IMAPSource Proceedings 2009 (Symposium): 304–8. https://doi.org/10.4071/001c.161858.
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