ISSN 2380-4505
Vol. 2009, Issue Symposium, 2009April 28, 2026 EDT
Analysis of MEMS Structure Sidewalls for Carbon and Fluorinated Residue with SEM, EDS and TSA
Analysis of MEMS Structure Sidewalls for Carbon and Fluorinated Residue with SEM, EDS and TSA
Stevens, Colin, Robert Dean, and Lee Levine. 2026. “Analysis of MEMS Structure Sidewalls for Carbon and Fluorinated Residue with SEM, EDS and TSA.” IMAPSource Proceedings 2009 (Symposium): 181–84. https://doi.org/10.4071/001c.161409.