Fabrication of 3-D Microstructures with Permanent Dielectric Dry Film

Tobias Baumgartner; Karin Hauck; Kai Zoschke; Michael Töpper; Hidetaka Uno; Werner Liebsch; Hao Yun; Mats J. Ehlin; Karl H. Dietz

doi:10.4071/001c.160901

Baumgartner, Tobias, Karin Hauck, Kai Zoschke, Michael Töpper, Hidetaka Uno, Werner Liebsch, Hao Yun, Mats J. Ehlin, and Karl H. Dietz. 2026. “Fabrication of 3-D Microstructures with Permanent Dielectric Dry Film.” IMAPSource Proceedings 2009 (Symposium): 099–103. https://doi.org/10.4071/001c.160901.

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