Wafer Level Encapsulation of Micromachined Pressure Sensors to Realize a Liquid Flow Sensor

Ali Shakir; Krishnaswami Srihari; Bob Murcko; Changhan Yun; Bob Sulouff

doi:10.4071/001c.165482

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Shakir, Ali, Krishnaswami Srihari, Bob Murcko, Changhan Yun, and Bob Sulouff. 2026. “Wafer Level Encapsulation of Micromachined Pressure Sensors to Realize a Liquid Flow Sensor.” IMAPSource Proceedings 2008 (Symposium): 729–36. https://doi.org/10.4071/001c.165482.

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