ISSN 2380-4505
Vol. 2008, Issue Symposium, 2008July 21, 2026 EDT
Nano Electro-Machining (nano-EM): A Novel Method for Sculpting Nano Vias (< 20 nm) for Nanoscale Packaging
Nano Electro-Machining (nano-EM): A Novel Method for Sculpting Nano Vias (< 20 nm) for Nanoscale Packaging
Malshe, Ajay P., Kumar R. Virwani, Valliappa Kalyanasundaram, and Kamlakar P. Rajurkar. 2026. “Nano Electro-Machining (Nano-EM): A Novel Method for Sculpting Nano Vias (< 20 Nm) for Nanoscale Packaging.” IMAPSource Proceedings 2008 (Symposium): 527–32. https://doi.org/10.4071/001c.165364.