ISSN 2380-4505
Vol. 2008, Issue Symposium, 2008July 21, 2026 EDT
Deposition of Ba(1-x)Ca(x)Ti(1-y)Zr(y)O(3) Films on HR-Si Substrate Using RF Sputtering by Design of Experiment Method
Deposition of Ba(1-x)Ca(x)Ti(1-y)Zr(y)O(3) Films on HR-Si Substrate Using RF Sputtering by Design of Experiment Method
Yeh, Hsin-Hsien, Sheng-Hao Chang, Chiung-Hsiung Chen, Jiun-Jang Yu, Ying-Chang Hung, and Tai-Bor Wu. 2026. “Deposition of Ba(1-x)Ca(x)Ti(1-y)Zr(y)O(3) Films on HR-Si Substrate Using RF Sputtering by Design of Experiment Method.” IMAPSource Proceedings 2008 (Symposium): 502–6. https://doi.org/10.4071/001c.165356.