Bonding with Al Metallurgies for 200mm MEMS Devices

Shari Farrens; Mark Franklin; Sumant Sood

doi:10.4071/001c.165462

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Farrens, Shari, Mark Franklin, and Sumant Sood. 2026. “Bonding with Al Metallurgies for 200mm MEMS Devices.” IMAPSource Proceedings 2008 (Symposium): 629–32. https://doi.org/10.4071/001c.165462.

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