Vol. 2014, Issue 1, 2014January 01, 2014 EDT
Hermetic Electrical Feedthroughs Based on the Diffusion of Platinum into Silicon
Hermetic Electrical Feedthroughs Based on the Diffusion of Platinum into Silicon
Rudmann, Linda, Juan S. Ordonez, Hans Zappe, and Thomas Stieglitz. 2014. “Hermetic Electrical Feedthroughs Based on the Diffusion of Platinum into Silicon.” IMAPSource Proceedings 2014 (1): 729–34. https://doi.org/10.4071/isom-WP45.
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