Multi-scale X-ray tomography for process and quality control in 3D TSV packaging

Ehrenfried Zschech; Sven Niese; Markus Löffler; M. Jürgen Wolf

doi:10.4071/isom-TP12

Zschech, Ehrenfried, Sven Niese, Markus Löffler, and M. Jürgen Wolf. 2014. “Multi-Scale X-Ray Tomography for Process and Quality Control in 3D TSV Packaging.” IMAPSource Proceedings 2014 (1): 184–87. https://doi.org/10.4071/isom-TP12.

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Multi-scale X-ray tomography for process and quality control in 3D TSV packaging

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