ISSN 2380-4505
Vol. 2014, Issue 1, 2014January 01, 2014 EDT
Optical Characterization and Defect inspection for 3D stacked IC technology
Optical Characterization and Defect inspection for 3D stacked IC technology
Fresquet, Gilles, and Jean-Philippe Piel. 2014. “Optical Characterization and Defect Inspection for 3D Stacked IC Technology.” IMAPSource Proceedings 2014 (1): 630–34. https://doi.org/10.4071/isom-WP17.