LidroCUT – Ultrashort-pulsed Laser Processing in Liquids for Clean Dicing in One Process Step

Jan-Philipp Wessels; Katharina Laake; Jan Stefan Hoppius; Alexander Kanitz

doi:10.4071/001c.129608

Wessels, Jan-Philipp, Katharina Laake, Jan Stefan Hoppius, and Alexander Kanitz. 2025. “LidroCUT – Ultrashort-Pulsed Laser Processing in Liquids for Clean Dicing in One Process Step.” IMAPSource Proceedings 2024 (Symposium): 329–34. https://doi.org/10.4071/001c.129608.

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LidroCUT – Ultrashort-pulsed Laser Processing in Liquids for Clean Dicing in One Process Step

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