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Symposium Proceedings
Vol. 2024, Issue Symposium, 2024February 13, 2025 EDT

Advanced 3D Integrated Circuit Packaging: Metallurgical Improvement and FLOLA (Flux-Less Oxide-removal Laser Assembly) Process at a 9㎛-Pitch Micro-Bump

Seok-Geun Ahn, Ju-Hyeon Oh, Gwang-Jae Jeon, Dae-Ho Lee, Sun-Woo Choi, Kyoung-A Kim, Hyo-Kyeong Yun, Jin-Young Choi, Seok-Hyun Lee, Su-Jin Ahn,
ChipletDiffusion barrierFine-pitch micro-bumpFlux-less bondingHeterogeneous integrationIntermetallic compound3D-IC
https://doi.org/10.4071/001c.129764
IMAPSource Conference Papers
Ahn, Seok-Geun, Ju-Hyeon Oh, Gwang-Jae Jeon, Dae-Ho Lee, Sun-Woo Choi, Kyoung-A Kim, Hyo-Kyeong Yun, Jin-Young Choi, Seok-Hyun Lee, and Su-Jin Ahn. 2025. “Advanced 3D Integrated Circuit Packaging: Metallurgical Improvement and FLOLA (Flux-Less Oxide-Removal Laser Assembly) Process at a 9㎛-Pitch Micro-Bump.” IMAPSource Proceedings 2024 (Symposium): 103–7. https:/​/​doi.org/​10.4071/​001c.129764.
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