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Symposium Proceedings
Vol. 2015, Issue 1, 2015October 01, 2015 EDT

Sol-gel doped-PZT thin films for integrated tunable capacitors

Warda Benhadjala, Gwenael Le Rhun, Christel Dieppedale, Florence Sonnerat, Jennifer Guillaume, Clémence Bonnard, Philippe Renaux, Henri Sibuet, Christophe Billard, Pascal Gardes, Patrick Poveda,
Doped PZTsol-geldielectrics propertieshigh tunabilitythin filmstunable capacitors
https://doi.org/10.4071/isom-2015-WA41
IMAPSource Conference Papers
Benhadjala, Warda, Gwenael Le Rhun, Christel Dieppedale, Florence Sonnerat, Jennifer Guillaume, Clémence Bonnard, Philippe Renaux, et al. 2015. “Sol-Gel Doped-PZT Thin Films for Integrated Tunable Capacitors.” IMAPSource Proceedings 2015 (1): 256–61. https:/​/​doi.org/​10.4071/​isom-2015-WA41.
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