Improving mean time to develop micro-bump/pillar fabrication process for vertical interconnections by combined defectivity and metrology approach

Devanciard, Nicolas, Franck Bana, Nicolas Bresson, Stéphane Rey, Carlos Beitia, Dario Alliata, Darcy Hart, John Thornell, and Justin Miller. 2015. “Improving Mean Time to Develop Micro-Bump/Pillar Fabrication Process for Vertical Interconnections by Combined Defectivity and Metrology Approach.” IMAPSource Proceedings 2015 (1): 493–98. https:/​/​doi.org/​10.4071/​isom-2015-WP55.