Sol-gel doped-PZT thin films for integrated tunable capacitors

Warda Benhadjala; Gwenael Le Rhun; Christel Dieppedale; Florence Sonnerat; Jennifer Guillaume; Clémence Bonnard; Philippe Renaux; Henri Sibuet; Christophe Billard; Pascal Gardes; Patrick Poveda

doi:10.4071/isom-2015-WA41

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Benhadjala, Warda, Gwenael Le Rhun, Christel Dieppedale, Florence Sonnerat, Jennifer Guillaume, Clémence Bonnard, Philippe Renaux, et al. 2015. “Sol-Gel Doped-PZT Thin Films for Integrated Tunable Capacitors.” IMAPSource Proceedings 2015 (1): 256–61. https://doi.org/10.4071/isom-2015-WA41.

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