Vol. 2012, Issue 1, 2012January 01, 2012 EDT
Low Temperature Hybrid Bonding of Organic/Inorganic Substrates at Atmospheric Pressure
Low Temperature Hybrid Bonding of Organic/Inorganic Substrates at Atmospheric Pressure
Shigetou, Akitsu. 2012. “Low Temperature Hybrid Bonding of Organic/Inorganic Substrates at Atmospheric Pressure.” IMAPSource Proceedings 2012 (1): 497–502. https://doi.org/10.4071/isom-2012-TP66.
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