Vol. 2010, Issue 1, 2010January 01, 2010 EDT
Wafer-Level hermetic packaging for bio-medical applications
Wafer-Level hermetic packaging for bio-medical applications
La Manna, Antonio, Carine Gerets, Maaike Op de Beeck, Thibault Buisson, Eric Dy, and Philippe Soussan. 2010. “Wafer-Level Hermetic Packaging for Bio-Medical Applications.” IMAPSource Proceedings 2010 (1): 344–47. https://doi.org/10.4071/isom-2010-TP5-Paper4.