Vol. 2010, Issue 1, 2010January 01, 2010 EDT
The Use of Metallographic and SEM Analysis for Characterization of Sidewall Surfaces in MEMS Devices with DRIE Processing
The Use of Metallographic and SEM Analysis for Characterization of Sidewall Surfaces in MEMS Devices with DRIE Processing
Stevens, Colin, Robert Dean, Samuel Lawrence, and Lee Levine. 2010. “The Use of Metallographic and SEM Analysis for Characterization of Sidewall Surfaces in MEMS Devices with DRIE Processing.” IMAPSource Proceedings 2010 (1): 703–6. https://doi.org/10.4071/isom-2010-WP5-Paper3.