Vol. 2023, Issue EMPC, 2023March 06, 2024 EDT
Lamination of Capacitive Micromachined Ultrasonic Transducer on a Piezoelectric Array: Process and Evaluation
Lamination of Capacitive Micromachined Ultrasonic Transducer on a Piezoelectric Array: Process and Evaluation
Le, Duy Hoang, Tung Manh, and Lars Hoff. 2024. “Lamination of Capacitive Micromachined Ultrasonic Transducer on a Piezoelectric Array: Process and Evaluation.” IMAPSource Proceedings 2023 (EMPC): 228–31. https://doi.org/10.4071/001c.94759.