From MEMS Strip to MEMS Unit: a Comprehensive Simulation Approach to Warpage

Andrea Ratti; Daniele Simoncini; Annabel Adolfo; Marco Del Sarto; Alex Gritti; Patrick Fedeli; Luca Maggi; Teresa Napolitano; Mark Andrew Shaw; Jefferson Talledo

doi:10.4071/001c.94819

Ratti, Andrea, Daniele Simoncini, Annabel Adolfo, Marco Del Sarto, Alex Gritti, Patrick Fedeli, Luca Maggi, Teresa Napolitano, Mark Andrew Shaw, and Jefferson Talledo. 2024. “From MEMS Strip to MEMS Unit: A Comprehensive Simulation Approach to Warpage.” IMAPSource Proceedings 2023 (EMPC): 296–301. https://doi.org/10.4071/001c.94819.

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