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EMPC Conference Proceedings (IMAPS Europe)
Vol. 2023, Issue EMPC, 2023March 04, 2024 EDT

Negative-tone Photo-definable Polyimide with High Thermal Stability and Thick Film Processability

Hitoshi Araki, Takayuki Kaneki, Yu Shoji, Chika Hibino,
Photo-definable polyimideThick filmHigh thermal stabilityPassivation layerPower semiconductor
https://doi.org/10.4071/001c.94635
IMAPSource Conference Papers
Araki, Hitoshi, Takayuki Kaneki, Yu Shoji, and Chika Hibino. 2024. “Negative-Tone Photo-Definable Polyimide with High Thermal Stability and Thick Film Processability.” IMAPSource Proceedings 2023 (EMPC): 10–13. https:/​/​doi.org/​10.4071/​001c.94635.
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