Bimorph Diaphragm Formed by Two PZT Sheets on Micromachined Silicon for Sound Generation

Youngki Choe; Shih-Jui Chen; Eun Sok Kim

doi:10.4071/2010DPC-wp25

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Choe, Youngki, Shih-Jui Chen, and Eun Sok Kim. 2010. “Bimorph Diaphragm Formed by Two PZT Sheets on Micromachined Silicon for Sound Generation.” IMAPSource Proceedings 2010 (DPC): 1887–1905. https://doi.org/10.4071/2010DPC-wp25.

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