Vol. 2010, Issue DPC, 2010January 01, 2010 EDT
Bimorph Diaphragm Formed by Two PZT Sheets on Micromachined Silicon for Sound Generation
Bimorph Diaphragm Formed by Two PZT Sheets on Micromachined Silicon for Sound Generation
Youngki Choe, Shih-Jui Chen, Eun Sok Kim,
Choe, Youngki, Shih-Jui Chen, and Eun Sok Kim. 2010. “Bimorph Diaphragm Formed by Two PZT Sheets on Micromachined Silicon for Sound Generation.” IMAPSource Proceedings 2010 (DPC): 1887–1905. https://doi.org/10.4071/2010DPC-wp25.