Vol. 2010, Issue DPC, 2010January 01, 2010 EDT
Design of a MEMS Force Sensor for Quantitative Measurement in the Nano- to Pico-Newton Range
Design of a MEMS Force Sensor for Quantitative Measurement in the Nano- to Pico-Newton Range
Li-Anne Liew, John M. Moreland, Jonathan R. Pratt,
Liew, Li-Anne, John M. Moreland, and Jonathan R. Pratt. 2010. “Design of a MEMS Force Sensor for Quantitative Measurement in the Nano- to Pico-Newton Range.” IMAPSource Proceedings 2010 (DPC): 1841–68. https://doi.org/10.4071/2010DPC-wp23.