ISSN 2380-4505
Vol. 2010, Issue DPC, 2010January 01, 2010 EDT
Integration of Electroactive Polymers in MEMS Ultrasonic Sensors
Integration of Electroactive Polymers in MEMS Ultrasonic Sensors
Michael Kranz, Michael Whitley, Sharon Sanchez, Michael Allen,
Kranz, Michael, Michael Whitley, Sharon Sanchez, and Michael Allen. 2010. “Integration of Electroactive Polymers in MEMS Ultrasonic Sensors.” IMAPSource Proceedings 2010 (DPC): 643–70. https://doi.org/10.4071/2010DPC-ta24.