ISSN 2380-4505
Vol. 2010, Issue DPC, 2010January 01, 2010 EDT
Vacuum Packaged Silicon MEMS Gyroscope with Q-Factor Above 0.5 Million
Vacuum Packaged Silicon MEMS Gyroscope with Q-Factor Above 0.5 Million
Alexander A. Trusov, A. R. Schofield, A. M. Shkel,
Trusov, Alexander A., A. R. Schofield, and A. M. Shkel. 2010. “Vacuum Packaged Silicon MEMS Gyroscope with Q-Factor Above 0.5 Million.” IMAPSource Proceedings 2010 (DPC): 1335–59. https://doi.org/10.4071/2010DPC-wa22.