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Device Packaging Conference Presentations
Vol. 2010, Issue DPC, 2010
January 01, 2010 EDT
Processing of Lithographically Defined Apex Glass Structures with Smooth and Transparent Sidewalls
Khalid H.M. Tantawi
,
Janeczka Oates
,
John D. Williams
,
Glass MEMS
micro-optics
Photosensitive glass
•
https://doi.org/10.4071/2010DPC-tp25
IMAPSource Conference Papers
Tantawi, Khalid H.M., Janeczka Oates, and John D. Williams. 2010. “Processing of Lithographically Defined Apex Glass Structures with Smooth and Transparent Sidewalls.”
IMAPSource Proceedings
2010 (DPC): 971–91.
https://doi.org/10.4071/2010DPC-tp25
.
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