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Device Packaging Conference Presentations
Vol. 2010, Issue DPC, 2010January 01, 2010 EDT

Processing of Lithographically Defined Apex Glass Structures with Smooth and Transparent Sidewalls

Khalid H.M. Tantawi, Janeczka Oates, John D. Williams,
Glass MEMS micro-optics Photosensitive glass
• https://doi.org/10.4071/2010DPC-tp25
IMAPSource Conference Papers
Tantawi, Khalid H.M., Janeczka Oates, and John D. Williams. 2010. “Processing of Lithographically Defined Apex Glass Structures with Smooth and Transparent Sidewalls.” IMAPSource Proceedings 2010 (DPC): 971–91. https://doi.org/10.4071/2010DPC-tp25.
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