Vol. 2013, Issue DPC, 2013January 01, 2013 EDT
Detection and Mitigation of Electrostatic Pull-in Instability in MEMS Parallel Plate Actuators
Detection and Mitigation of Electrostatic Pull-in Instability in MEMS Parallel Plate Actuators
Stevens, Colin, and Robert Dean. 2013. “Detection and Mitigation of Electrostatic Pull-in Instability in MEMS Parallel Plate Actuators.” IMAPSource Proceedings 2013 (DPC): 495–514. https://doi.org/10.4071/2013DPC-ta31.
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