Vol. 2013, Issue DPC, 2013January 01, 2013 EDT
Fabrication of 3D-IC Interposers
Fabrication of 3D-IC Interposers
John T. Keech, Garret Piech, Scott Pollard,
Keech, John T., Garret Piech, and Scott Pollard. 2013. “Fabrication of 3D-IC Interposers.” IMAPSource Proceedings 2013 (DPC): 1295–1321. https://doi.org/10.4071/2013DPC-wp11.