Micromachined High Density Embedded Capacitor Technologies for Silicon Interposers

Aubrey Beal; T. Baginski; R. Dean; M. Hamilton

doi:10.4071/2012DPC-tp42

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Beal, Aubrey, T. Baginski, R. Dean, and M. Hamilton. 2012. “Micromachined High Density Embedded Capacitor Technologies for Silicon Interposers.” IMAPSource Proceedings 2012 (DPC): 1192–1222. https://doi.org/10.4071/2012DPC-tp42.

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