Vol. 2012, Issue DPC, 2012January 01, 2012 EDT
Micromachined High Density Embedded Capacitor Technologies for Silicon Interposers
Micromachined High Density Embedded Capacitor Technologies for Silicon Interposers
Aubrey Beal, T. Baginski, R. Dean, M. Hamilton,
Beal, Aubrey, T. Baginski, R. Dean, and M. Hamilton. 2012. “Micromachined High Density Embedded Capacitor Technologies for Silicon Interposers.” IMAPSource Proceedings 2012 (DPC): 1192–1222. https://doi.org/10.4071/2012DPC-tp42.