Modeling and Simulation of 3D MEMS Integrated RF Circuits

Bruce Kim; Sukeshwar Kannan; Anurag Gupta; Naga Sai Evana

doi:10.4071/2012DPC-wp35

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Kim, Bruce, Sukeshwar Kannan, Anurag Gupta, and Naga Sai Evana. 2012. “Modeling and Simulation of 3D MEMS Integrated RF Circuits.” IMAPSource Proceedings 2012 (DPC): 2006–27. https://doi.org/10.4071/2012DPC-wp35.

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