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Device Packaging Conference Presentations
Vol. 2010, Issue DPC, 2010
January 01, 2010 EDT
Challenges Facing Resonant MEMS Sensors
Michael Kranz
,
MEMS
Sensors
Gyroscopes
•
https://doi.org/10.4071/2010DPC-wa25
IMAPSource Conference Papers
Kranz, Michael. 2010. “Challenges Facing Resonant MEMS Sensors.”
IMAPSource Proceedings
2010 (DPC): 1401–25.
https://doi.org/10.4071/2010DPC-wa25
.
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