Vol. 2012, Issue DPC, 2012January 01, 2012 EDT
Low-Temperature Indium Bonding for MEMS Devices
Low-Temperature Indium Bonding for MEMS Devices
Daniel Harris, Robert Dean, Ashish Palkar, Mike Palmer, Charles Ellis, Gary Wonacott,
Harris, Daniel, Robert Dean, Ashish Palkar, Mike Palmer, Charles Ellis, and Gary Wonacott. 2012. “Low-Temperature Indium Bonding for MEMS Devices.” IMAPSource Proceedings 2012 (DPC): 2543–66. https://doi.org/10.4071/2012DPC-tha34.