Vol. 2014, Issue DPC, 2014January 01, 2014 EDT
A Current-Controlled PCB Integrated MEMS Tilt Mirror
A Current-Controlled PCB Integrated MEMS Tilt Mirror
Robert N. Dean, Colin B. Stevens, John J. Tatarchuk,
Dean, Robert N., Colin B. Stevens, and John J. Tatarchuk. 2014. “A Current-Controlled PCB Integrated MEMS Tilt Mirror.” IMAPSource Proceedings 2014 (DPC): 588–608. https://doi.org/10.4071/2014DPC-ta32.