Vol. 2011, Issue DPC, 2011January 01, 2011 EDT
In-Situ Wafer-Level Polarization of Electret Films in MEMS Acoustic Sensor Arrays
In-Situ Wafer-Level Polarization of Electret Films in MEMS Acoustic Sensor Arrays
Kranz, Michael, Mark Allen, and Tracy Hudson. 2011. “In-Situ Wafer-Level Polarization of Electret Films in MEMS Acoustic Sensor Arrays.” IMAPSource Proceedings 2011 (DPC): 1732–60. https://doi.org/10.4071/2011DPC-wp24.
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