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Device Packaging Conference Presentations
Vol. 2011, Issue DPC, 2011
January 01, 2011 EDT
Cu MEMS
Charles Ellis
,
Aubrey Beal
,
Robert Dean
,
MEMS
Copper
XeF2
•
https://doi.org/10.4071/2011DPC-tp25
IMAPSource Conference Papers
Ellis, Charles, Aubrey Beal, and Robert Dean. 2011. “Cu MEMS.”
IMAPSource Proceedings
2011 (DPC): 952–73.
https://doi.org/10.4071/2011DPC-tp25
.
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