Charlet, Barbara, B. Charlet, L. Di Cioccio, N. Rochat, O. Renault, L. Clavelier, and C. Deguet. 2011. “Hetero-Structure Integration Using an Atmospheric Plasma Treatment for Surface Preparation before Its Interconnection.”
IMAPSource Proceedings 2011 (DPC): 817–35.
https://doi.org/10.4071/2011DPC-tp15.