Vol. 2011, Issue DPC, 2011January 01, 2011 EDT
Hetero-Structure Integration using an Atmospheric Plasma Treatment for Surface Preparation before its Interconnection
Hetero-Structure Integration using an Atmospheric Plasma Treatment for Surface Preparation before its Interconnection
Charlet, Barbara, B. Charlet, L. Di Cioccio, N. Rochat, O. Renault, L. Clavelier, and C. Deguet. 2011. “Hetero-Structure Integration Using an Atmospheric Plasma Treatment for Surface Preparation before Its Interconnection.” IMAPSource Proceedings 2011 (DPC): 817–35. https://doi.org/10.4071/2011DPC-tp15.
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