PCBMEMS as a Flexible Path to Devices and Systems across Spatial Scales

David Fries; Liesl Hotaling; Geran Barton; Stan Ivanov; Michelle Janowiak; Matt Smith

doi:10.4071/2011DPC-ta24

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Fries, David, Liesl Hotaling, Geran Barton, Stan Ivanov, Michelle Janowiak, and Matt Smith. 2011. “PCBMEMS as a Flexible Path to Devices and Systems across Spatial Scales.” IMAPSource Proceedings 2011 (DPC): 597–634. https://doi.org/10.4071/2011DPC-ta24.

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