Vol. 2011, Issue DPC, 2011January 01, 2011 EDT
Packaging of MEMS for Integrated RF Circuit Verifications
Packaging of MEMS for Integrated RF Circuit Verifications
Bruce C. Kim, Sai Evana, Rahim Kasim,
Kim, Bruce C., Sai Evana, and Rahim Kasim. 2011. “Packaging of MEMS for Integrated RF Circuit Verifications.” IMAPSource Proceedings 2011 (DPC): 926–51. https://doi.org/10.4071/2011DPC-tp24.