Vol. 2017, Issue 1, 2017October 01, 2017 EDT
Die Placement Error management for Fan out Applications using Projection Lithography
Die Placement Error management for Fan out Applications using Projection Lithography
Hichri, Habib, Mo Abdol, and Markus Arendt. 2017. “Die Placement Error Management for Fan out Applications Using Projection Lithography.” IMAPSource Proceedings 2017 (1): 497–501. https://doi.org/10.4071/isom-2017-THA13_010.