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Symposium Proceedings
Vol. 2017, Issue 1, 2017October 01, 2017 EDT

In-line advanced process control solution for the fabrication of micro-bumps

Dario Alliata, Stephane Godny, Cleonisse Serrecchia, Tristan Combier, Astrid Sippel, Philippe Gastaldo,
MetrologyInspectionDefectivityProcess Controlmicro-bumpConfocal Chromatic Sensor
https://doi.org/10.4071/isom-2017-TP35_025
IMAPSource Conference Papers
Alliata, Dario, Stephane Godny, Cleonisse Serrecchia, Tristan Combier, Astrid Sippel, and Philippe Gastaldo. 2017. “In-Line Advanced Process Control Solution for the Fabrication of Micro-Bumps.” IMAPSource Proceedings 2017 (1): 87–92. https:/​/​doi.org/​10.4071/​isom-2017-TP35_025.
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