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Device Packaging Conference Presentations
Vol. 2022, Issue DPC, 2022November 14, 2023 EDT

Mask-less Laser Direct Imaging & Adaptive Patterning for Fan-Out Heterogeneous Integration

Clifford Sandstrom, Tim Olson,
Laser Direct Imaging (LDI)Adaptive Patterningmask-less technologyElectron beam lithography (e-beam)die shift
https://doi.org/10.4071/001c.90153
IMAPSource Conference Papers
Sandstrom, Clifford, and Tim Olson. 2023. “Mask-Less Laser Direct Imaging & Adaptive Patterning for Fan-Out Heterogeneous Integration.” IMAPSource Proceedings 2022 (DPC): 200–240. https:/​/​doi.org/​10.4071/​001c.90153.
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