ISSN 2380-4505
Vol. 2017, Issue DPC, 2017January 01, 2017 EDT
Pillar Density Modulation in a Semi-packed MEMS Column
Pillar Density Modulation in a Semi-packed MEMS Column
Ryan Chan, Bishnu Regmi, Ana Lopez Marcano, Sarah El-Helw, Masoud Agah,
Chan, Ryan, Bishnu Regmi, Ana Lopez Marcano, Sarah El-Helw, and Masoud Agah. 2017. “Pillar Density Modulation in a Semi-Packed MEMS Column.” IMAPSource Proceedings 2017 (DPC): 1–22. https://doi.org/10.4071/2017DPC-TP3_Presentation5.