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ISSN 2380-4505
Ceramics Conference Papers
Vol. 2023, Issue HiTEC, CICMT, Power, 2023October 17, 2023 EDT

Shadow masks as an alternative method to lithography for the structuring of thin film layers on LTCC substrates

Heike Bartsch, Nesrine Jaziri, Konrad Jaekel, Norayr Nessimian, Jens Müller,
Thin film technologylow temperature co-fired ceramicsphysical vapor depositionshadow maskpolyimide
https://doi.org/10.4071/001c.89092

Articles in Vol. 2023, Issue HiTEC, CICMT, Power, 2023

Vol. 2023, Issue HiTEC, CICMT, Power, 2023
  • Shadow masks as an alternative method to lithography for the structuring of thin film layers on LTCC substrates
    Heike BartschNesrine JaziriKonrad JaekelNorayr NessimianJens Müller
  • AuSn Preform Thickness’s Effect on Thermal Management in Semiconductor Laser Applications
    Jenny GallerySamuel Lytwynec
  • Investigations of selected influencing process factors for transient liquid phase soldering (TLPS) as a die-attach method for automotive power modules
    Bettina OttingerJoshua HolverscheidSebastian KönigAnnette BrunnerDr. Lars MüllerDr. Christian GothProf. Dr. Jörg Franke
  • Reducing High Temperature System Development Cycle Time and Cost with Additively Manufactured Connectors
    Matthew BakowskiWalter NiblockJacob Kupernik,A. Matt Francis
  • Investigation and Evaluation of High-Temperature Encapsulation Materials for Power Module Applications
    Benjamin LyonChristina DiMarino
  • Factoring Interacting Stress Mechanisms in Design for Reliability of Extreme Environment Power Modules
    David HuitinkWhit VinsonCollin RubyImam Al RaziDavid Agogo-MawuliAlan MantoothYarui Peng
  • An update on high temperature tantalum capacitor technology
    D. WestR. DemckoR. MessinaA. Stanziola
  • Gate Driver Design in 180 nm SOI CMOS Process for Heterogeneous Integration Inside SiC Power Module
    Asif FaruqueAyesha HassanRiya PaulH. Alan Mantooth
  • Recent Progress in Extreme Environment Durable SiC JFET-R Integrated Circuit Technology
    Philip G. NeudeckDavid J. SpryMichael J. KrasowskiCarl W. ChangJosé M. GonzalezSrihari RajgopalNorman F. ProkopLawrence C. GreerDorothy LukcoShamir Maldonado-RiveraChristina M. Adams
  • Additive Prototyping for Rapid Circuit and Interface Development at 200°C+
    Jacob KupernikMatthew BakowskiBrandon DyerWalter NiblockA. Matt Francis
  • Next Generation High Powered RF and Optical Packages
    Ramesh KothandapaniTan Sin LiTee Zhen WeiNoel DeLeonChen WangChristopher Johnson
IMAPSource Conference Papers
Bartsch, Heike, Nesrine Jaziri, Konrad Jaekel, Norayr Nessimian, and Jens Müller. 2023. “Shadow Masks as an Alternative Method to Lithography for the Structuring of Thin Film Layers on LTCC Substrates.” IMAPSource Proceedings 2023 (HiTEC, CICMT, Power): 1–4. https://doi.org/10.4071/001c.89092.
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