Vol. 2011, Issue CICMT, 2011September 01, 2011 EDT
Chemical Solution Deposition of High-Quality SrRu O3 Thin-Film Electrodes and the Dielectric Properties of Integrated Lead Lanthanum Zirconate Titanate Films for Embedded Passives
Chemical Solution Deposition of High-Quality SrRu O3 Thin-Film Electrodes and the Dielectric Properties of Integrated Lead Lanthanum Zirconate Titanate Films for Embedded Passives
Manoj Narayanan, Beihai Ma, Rachel Koritala, Sheng Tong, U. Balachandran,
Narayanan, Manoj, Beihai Ma, Rachel Koritala, Sheng Tong, and U. Balachandran. 2011. “Chemical Solution Deposition of High-Quality SrRu O3 Thin-Film Electrodes and the Dielectric Properties of Integrated Lead Lanthanum Zirconate Titanate Films for Embedded Passives.” IMAPSource Proceedings 2011 (CICMT): 235–40. https://doi.org/10.4071/CICMT-2011-WP22.