AlScN-on-SiC Diaphragm Multimode Micromechanical Resonators for High-Temperature Sensing Applications

Wen Sui; Haoran Wang; Jaesung Lee; Afzaal Qamar; Mina Rais-Zadeh; Philip X.-L. Feng

doi:10.4071/001c.89964

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Sui, Wen, Haoran Wang, Jaesung Lee, Afzaal Qamar, Mina Rais-Zadeh, and Philip X.-L. Feng. 2023. “AlScN-on-SiC Diaphragm Multimode Micromechanical Resonators for High-Temperature Sensing Applications.” IMAPSource Proceedings 2022 (HiTEN): 119–24. https://doi.org/10.4071/001c.89964.

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