Vol. 2012, Issue CICMT, 2012September 01, 2012 EDT
Manufacturing and Characterization of a Deformable LTCC Membrane with Integrated Temperature Sensors, Strain Gauges and Heating Structures
Manufacturing and Characterization of a Deformable LTCC Membrane with Integrated Temperature Sensors, Strain Gauges and Heating Structures
N. Gutzeit, J. Müller, C. Bruchmann, S. Gebhardt,
Gutzeit, N., J. Müller, C. Bruchmann, and S. Gebhardt. 2012. “Manufacturing and Characterization of a Deformable LTCC Membrane with Integrated Temperature Sensors, Strain Gauges and Heating Structures.” IMAPSource Proceedings 2012 (CICMT): 512–19. https://doi.org/10.4071/CICMT-2012-WP31.