Manufacturing and Characterization of a Deformable LTCC Membrane with Integrated Temperature Sensors, Strain Gauges and Heating Structures

N. Gutzeit; J. Müller; C. Bruchmann; S. Gebhardt

doi:10.4071/CICMT-2012-WP31

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Gutzeit, N., J. Müller, C. Bruchmann, and S. Gebhardt. 2012. “Manufacturing and Characterization of a Deformable LTCC Membrane with Integrated Temperature Sensors, Strain Gauges and Heating Structures.” IMAPSource Proceedings 2012 (CICMT): 512–19. https://doi.org/10.4071/CICMT-2012-WP31.

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