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Ceramics Conference Papers
Vol. 2012, Issue CICMT, 2012September 01, 2012 EDT

Manufacturing and Characterization of a Deformable LTCC Membrane with Integrated Temperature Sensors, Strain Gauges and Heating Structures

N. Gutzeit, J. Müller, C. Bruchmann, S. Gebhardt,
deformableltcclow temperature co-fired ceramicmembranetemperature sensorstrain gauge
https://doi.org/10.4071/CICMT-2012-WP31
IMAPSource Conference Papers
Gutzeit, N., J. Müller, C. Bruchmann, and S. Gebhardt. 2012. “Manufacturing and Characterization of a Deformable LTCC Membrane with Integrated Temperature Sensors, Strain Gauges and Heating Structures.” IMAPSource Proceedings 2012 (CICMT): 512–19. https:/​/​doi.org/​10.4071/​CICMT-2012-WP31.
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