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Ceramics Conference Papers
Vol. 2012, Issue CICMT, 2012September 01, 2012 EDT

SiCer - A substrate to combine ceramic and silicon based micro systems

M. Fischer, T. Mache, B. Pawlowski, D. Schabbel, J. Müller,
SiCerSilicon-On-CeramicThrough Silicon ViasBlack Silicon
https://doi.org/10.4071/CICMT-2012-TP35
IMAPSource Conference Papers
Fischer, M., T. Mache, B. Pawlowski, D. Schabbel, and J. Müller. 2012. “SiCer - A Substrate to Combine Ceramic and Silicon Based Micro Systems.” IMAPSource Proceedings 2012 (CICMT): 158–61. https:/​/​doi.org/​10.4071/​CICMT-2012-TP35.
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