SiCer - A substrate to combine ceramic and silicon based micro systems

M. Fischer; T. Mache; B. Pawlowski; D. Schabbel; J. Müller

doi:10.4071/CICMT-2012-TP35

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Fischer, M., T. Mache, B. Pawlowski, D. Schabbel, and J. Müller. 2012. “SiCer - A Substrate to Combine Ceramic and Silicon Based Micro Systems.” IMAPSource Proceedings 2012 (CICMT): 158–61. https://doi.org/10.4071/CICMT-2012-TP35.

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