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Ceramics Conference Papers
Vol. 2012, Issue CICMT, 2012
September 01, 2012 EDT
SiCer - A substrate to combine ceramic and silicon based micro systems
M. Fischer
,
T. Mache
,
B. Pawlowski
,
D. Schabbel
,
J. Müller
,
SiCer
Silicon-On-Ceramic
Through Silicon Vias
Black Silicon
•
https://doi.org/10.4071/CICMT-2012-TP35
IMAPSource Conference Papers
Fischer, M., T. Mache, B. Pawlowski, D. Schabbel, and J. Müller. 2012. “SiCer - A Substrate to Combine Ceramic and Silicon Based Micro Systems.”
IMAPSource Proceedings
2012 (CICMT): 158–61.
https://doi.org/10.4071/CICMT-2012-TP35
.
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