Vol. 2012, Issue CICMT, 2012September 01, 2012 EDT
SiCer - A substrate to combine ceramic and silicon based micro systems
SiCer - A substrate to combine ceramic and silicon based micro systems
M. Fischer, T. Mache, B. Pawlowski, D. Schabbel, J. Müller,
Fischer, M., T. Mache, B. Pawlowski, D. Schabbel, and J. Müller. 2012. “SiCer - A Substrate to Combine Ceramic and Silicon Based Micro Systems.” IMAPSource Proceedings 2012 (CICMT): 158–61. https://doi.org/10.4071/CICMT-2012-TP35.