Vol. 2012, Issue CICMT, 2012September 01, 2012 EDT
Metal-based Optical MEMS Scanning Devices Using Lead-Free Piezoelectric Sheets Prepared by Aerosol Deposition
Metal-based Optical MEMS Scanning Devices Using Lead-Free Piezoelectric Sheets Prepared by Aerosol Deposition
Park, Jae-Hyuk, and Jun Akedo. 2012. “Metal-Based Optical MEMS Scanning Devices Using Lead-Free Piezoelectric Sheets Prepared by Aerosol Deposition.” IMAPSource Proceedings 2012 (CICMT): 246–50. https://doi.org/10.4071/CICMT-2012-TP62.
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